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Deliverables

D1.1 Project Portal
D1.2 Intermediate progress report
D1.3 Annual report 2015
D1.4 Intermediate progress report
D1.5 Annual report 2016
D1.6 Intermediate progress report
D1.7 Progress report
D2.1 Development of the first generation measurement system
D2.2 Automatic adjustable reference path system
D2.3 Active alignment unit for beam coupling and sensor integration based on adaptative optics
D2.4 Process optimized high NA scanning objective
D2.5 Design and implementation of automatic Point cloud analysis software
D2.6 External measurement head for high lateral resolution
D2.7 Development of the second generation inline measurement system
D2.8 Characterization and Evaluation of the topography sensor
D3.1 First Generation Adaptive Laser Micromachining System
D3.2 Calibration and Alignment System
D3.3 Final Adaptive Laser Micromachining System
D4.1 Dimensional patterns for micro-systems characterization
D8.6 Final Dissemination Plan
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Co-funded by the Horizon 2020
Framework Programme of the European Union
under grant agreement No 637045